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Nano- And Microelectromechanical Systems (Nems and Mems) and Molecular Mac Hines
by
David
A
. Lavan (Editor)
,
Arturo
A
.
Ayon
(Editor)
,
Thomas E. Buchheit (Editor)
,
Marc J. Madou (Editor)
Hardcover
, 298 Pages
, Published 2003 by Materials Research Society
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Materials Science of Microelectromechanical Systems (Mems) Devices IV (Materials Research Society Symposia Proceedings, V. 687.)
by
Arturo
A
.
Ayon
(Editor)
,
Thomas E. Buchheit (Editor)
,
Harold G. Kahn (Editor)
,
S. M. Spearing (Editor)
Hardcover
, 318 Pages
, Published 2002 by Materials Research Society
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