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Nano- And Microelectromechanical Systems (Nems and Mems) and Molecular Mac Hines
by David A. Lavan (Editor), Arturo A. Ayon (Editor), Thomas E. Buchheit (Editor), Marc J. Madou (Editor)
Hardcover, 298 Pages, Published 2003 by Materials Research Society

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Materials Science of Microelectromechanical Systems (Mems) Devices IV (Materials Research Society Symposia Proceedings, V. 687.)
by Arturo A. Ayon (Editor), Thomas E. Buchheit (Editor), Harold G. Kahn (Editor), S. M. Spearing (Editor)
Hardcover, 318 Pages, Published 2002 by Materials Research Society

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