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Binghamton University - FALL (Aug, Sept)2010

Textbooks for Course PHYS 644

Section 90

      
Introduction to Microfabrication ()
by Sami Franssila, Sami Fransilla
Paperback, 422 Pages, Published

ISBN-10: 0-470-85106-6        / 0470851066

ISBN-13: 978-0-470-85106-7 / 9780470851067

Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication


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