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 | Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition (2nd Edition) by Marc J. Madou Hardcover, 752 Pages, Published 2002 ISBN-10: 0-8493-0826-7 / 0849308267 ISBN-13: 978-0-8493-0826-0 / 9780849308260 MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate th | |