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 | Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Engineering) (3rd Edition) by Stephen A. Campbell Paperback, 672 Pages, Published 2007 ISBN-10: 0-19-532017-4 / 0195320174 ISBN-13: 978-0-19-532017-6 / 9780195320176 Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised | |