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University at Albany (SUNY) Bookstore - FALL 2010 | ||
Section 17372 | ||
 | Handbook of Silicon Semiconductor Metrology (1st Edition) by Alain C. Diebold (Editor), O. Roger Anderson Hardcover, 896 Pages, Published 2001 ISBN-10: 0-8247-0506-8 / 0824705068 ISBN-13: 978-0-8247-0506-0 / 9780824705060 Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and c | |