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University of Michigan - Ann Arbor North Campus - WINTER 2011 | ||
Section 001 | ||
 | Foundations of MEMS (1st Edition) by Chang Liu (Ph.D.) Textbook Binding, 530 Pages, Published 2005 ISBN-10: 0-13-147286-0 / 0131472860 ISBN-13: 978-0-13-147286-0 / 9780131472860 For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu dis | |