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Texas Tech University - FALL 2010 (AUG-DEC)

Textbooks for Course ECE 4381

Section 001

      
Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Engineering) ()
by Stephen A. Campbell
Paperback, 672 Pages, Published

ISBN-10: 0-19-532017-4        / 0195320174

ISBN-13: 978-0-19-532017-6 / 9780195320176

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised


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