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Southern Methodist University - SPRING 2011 | ||
Section 001C | ||
 | Microsensors, MEMS and Smart Devices (1st Edition) by Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, Gardner Et.Al Hardcover, 528 Pages, Published 2001 ISBN-10: 0-471-86109-X / 047186109X ISBN-13: 978-0-471-86109-6 / 9780471861096 Microsensors and MEMS (micro--electro--mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so--called "system--on--a--chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications rangi | |