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University of Houston - SPRING 2011 | ||
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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies by Badih El-Kareh Hardcover, 598 Pages, Published 2009 ISBN-10: 0-387-36798-5 / 0387367985 ISBN-13: 978-0-387-36798-9 / 9780387367989 Silicon Devices and Process Integration covers state-of-the-art silicon devices, their characteristics, and their interactions with process parameters. It serves as a comprehensive guide which addresses both the theoretical and practical aspects of modern silicon devices and the relationship between |