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University of Denver - Fall Quarter 2012-13 | ||
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Introductory MEMS: Fabrication and Applications by Richard A. Layton (Me Thomas M. Adams, Azad Siahmakoun, Hermann A. (Editor) Maurer, Marshall G.S. Hardcover, 444 Pages, Published 2009 ISBN-10: 0-387-09510-1 / 0387095101 ISBN-13: 978-0-387-09510-3 / 9780387095103 Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techn |