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Florida State University - Fall 2012 | ||
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 | Fundamentals of Microfabrication and Nanotechnology, Third Edition, Volume Two: Manufacturing Techniques for Microfabrication and Nanotechnology (3rd Edition) by Marc J. Madou, Usa Madou Hardcover, 670 Pages, Published 2011 ISBN-10: 1-4200-5519-4 / 1420055194 ISBN-13: 978-1-4200-5519-1 / 9781420055191 Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnology focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technol | |