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 | Microsystem Design (1st Edition) by Stephen D. Senturia Hardcover, 689 Pages, Published 2004 ISBN-10: 0-7923-7246-8 / 0792372468 ISBN-13: 978-0-7923-7246-2 / 9780792372462 The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, nois | |