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 | | Chemical Vapor Deposition by M. L. Hitchman (Editor), K. F. Jensen (Editor) ISBN-10: 9780123496706 ISBN-10: 0-12-349670-5 ISBN-13: 9780123496706 ISBN-13: 978-0-12-349670-6 Hardcover 1993-01-15 Academic Press Find Lowest Price |
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Product Description This wide-ranging volume covers recent developments in the theoretical understanding of the chemistry and physics of chemical vapour deposition (CVD). Contributors are drawn from both academia and industry to achieve a balaced coverage of the subject. The volume emphasizes principles and understanding rather than details of specific materials or processes. Specific examples are given to illustrate the principles. | ||